| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a manufacturing method of a gas sensor, stably detecting the gas concentration by preventing or restraining initial variation of sensor characteristic when an actual machine is loaded with the sensor. <P>SOLUTION: In a manufacturing process of an NOx sensor 1, two types of aging are performed for a detecting element 4. In the preceding first aging process, an electrode is activated to improve the sensing performance of the NOx sensor 1. In the second aging process, the NOx sensor 1 is driven in a lean atmosphere having a fixed humidity, whereby the initial variation of a second pump current Ip2 is eliminated to realize stabilization of sensor characteristic. Thus, when the NOx sensor is incorporated in the actual machine, immediately the NOx sensor 1 can be stably driven. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
