METHOD OF MANUFACTURING POTASSIUM NIOBATE SINGLE CRYSTAL THIN FILM, SURFACE ACOUSTIC WAVE ELEMENT, FREQUENCY FILTER, FREQUENCY OSCILLATOR, ELECTRONIC CIRCUIT AND ELECTRONIC APPLIANCE

摘要

PROBLEM TO BE SOLVED: To provide a method of manufacturing a KNbO3single crystal thin film by which a rhombic KNbO3single crystal thin film is epitaxially grown at a high deposition rate at a temperature near room temperature on various kinds of single crystal substrates, a surface acoustic wave element which has high k2and is frequency-band-widened , is small-sized and is excellently power-saved by providing the thin film obtained by the method, a frequency filter, a frequency oscillator, an electronic circuit and an electronic appliance.

SOLUTION: The method of manufacturing the KNbO3single crystal thin film comprises a coating process for coating an SrTiO3single crystal substrate 11 with liquid drops of an aqueous solution containing KNbO3by a liquid drop discharge method and a deposition process for depositing the potassium niobate single crystal layer 12 from the applied liquid drops by epitaxial growth.

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