| 摘要 |
PROBLEM TO BE SOLVED: To provide a stress measurement method and a stress measuring apparatus for more accurately measuring stress by excluding the influence of residual stress and lift-off and bringing the relationship between a measurement value outputted from a magnetic anisotropy sensor and the stress of an object to be measured closer to a linear relation in stress measurement using the magnetic anisotropy sensor. SOLUTION: The stress measuring apparatus comprises a degausser 2; a magnetic anisotropy sensor 3 having a core, where a coil for excitation for applying an AC magnetic field to the object to be measured and a coil for detecting lift-off for detecting lift-off are wound, and a core, where a coil for detecting a magnetic potential difference for measuring the strength of magnetization in the object to be measured is wound; a control circuit 15 for controlling various parts; and a computing unit 13. The computing unit 13 obtains a value corresponding to stress in the object to be measured by dividing the average value of first and second calculation values obtained by changing the degaussing direction by a value obtained by subtracting a specific value from the difference between the first and second calculation values. COPYRIGHT: (C)2005,JPO&NCIPI
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