ACTUATOR FOR INK-JET PRINTER

摘要

PROBLEM TO BE SOLVED: To perform trimming by use of a laser beam by controlling the laser beam precisely so as to trim the portion at which a piezoelectric/electrostrictive layer covers a vibration plate without causing damage in the vibration plate. SOLUTION: An actuator has an ink tank formed by integrally forming a thick-walled substrate 21 having a cavity structure, and a vibration plate 22 covering a cavity 20; and a piezoelectric/electrostrictive actuating unit 26 formed by disposing a piezoelectric/electrostrictive layer 24 between an upper electrode layer 25 and a lower electrode layer 23. The piezoelectric/electrostrictive actuating unit 26 is disposed on the ink tank so that the lower electrode layer 23 and the vibration plate 22 come in contact with each otehr. In the actuator, only a portion of the upper electrode layer 25 at a position where the piezoelectric/electrostrictive layer 24 covers the vibration plate 22 is subjected to trimming. The upper electrode layer 25 is subjected to trimming while the piezoelectric/electrostrictive layer 24 covers the vibration plate 22 at least in the vicinity of the portion of the upper electrode layer 25 to which trimming is performed. As a result, effective electrode area is controlled so as to adjust the ink ejection amount to an appropriate value. COPYRIGHT: (C)2005,JPO&NCIPI