发明名称 Fluid handling component with ultraphobic surfaces
摘要 A fluid handling component having a durable ultraphobic fluid contact surface that is capable of exhibiting ultraphobic properties at liquid pressures of one atmosphere and above. The surface generally includes a substrate portion with a multiplicity of projecting regularly shaped microscale or nanoscale asperities disposed so that the surface has a predetermined contact line density measured in meters of contact line per square meter of surface area equal to or greater than a contact line density value "LambdaL" determined according to the formula: <math-cwu id="MATH-US-00001"> <NUMBER>1</NUMBER> <MATH> <MROW> <MSUB> <MI>Lambda</MI> <MI>L</MI> </MSUB> <MO>=</MO> <MFRAC> <MROW> <MROW> <MO>-</MO> <MN>10</MN> </MROW> <MO>,</MO> <MN>330</MN> </MROW> <MROW> <MI>gamma</MI> <MO>⁢</MO> <MSTYLE> <MTEXT> </MTEXT> </MSTYLE> <MO>⁢</MO> <MROW> <MI>cos</MI> <MO>⁡</MO> <MROW> <MO>(</MO> <MROW> <MSUB> <MI>theta</MI> <MROW> <MI>a</MI> <MO>,</MO> <MN>0</MN> </MROW> </MSUB> <MO>+</MO> <MI>omega</MI> <MO>-</MO> <MROW> <MN>90</MN> <MO>⁢</MO> <MI>°</MI> </MROW> </MROW> <MO>)</MO> </MROW> </MROW> </MROW> </MFRAC> </MROW> </MATH> <mathematica-file id="MATHEMATICA-00001" file="US20040206410A1-20041021-M00001.NB"/> <image id="EMI-M00001" wi="216.027" he="18.96615" file="US20040206410A1-20041021-M00001.TIF" imf="TIFF" ti="MF"/> </MATH-CWU> where gamma is the surface tension of the liquid in Newtons per meter, thetaa,0 is the experimentally measured true advancing contact angle of the liquid on the asperity material in degrees, and omega is the asperity rise angle in degrees.
申请公布号 US2004206410(A1) 申请公布日期 2004.10.21
申请号 US20030454742 申请日期 2003.06.03
申请人 ENTEGRIS, INC. 发明人 EXTRAND CHARLES W.
分类号 B01L3/00;B01L9/00;B01L99/00;F15D1/06;H01L21/673;(IPC1-7):F15D1/00 主分类号 B01L3/00
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