| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a crystal analyzer capable of carrying out the three-dimensional analysis of a crystal. <P>SOLUTION: A measuring surface S1 is scanned by an electron beam B2 and the detection of an electron beam back scattering diffraction pattern by a detection part 6 and the analysis of data D1 by a data processing part 9 are performed in relation to the respective pixels in the measuring surface S1 to obtain the two-dimensional distribution data K1 of a crystal orientation related to the measuring surface S1. Next, a sample 11 is sliced by irradiation with an ion beam B1 to form a next measuring surface S2 inside by predetermined distance L from the measuring surface S1. Thereafter, the two-dimensional distribution data K2 of the crystal orientation related to the measuring surface S2 is obtained. By repeatedly carrying out the operation mentioned above, the two-dimensional distribution data K3-Kn of the crystal orientation related to measuring surfaces S3-Sn are obtained successively. Next, a data processing part 9 is used to laminate the two-dimensional distribution data K1-Kn in this order to construct the three-dimensional distribution data Q of the crystal orientation. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
