摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for manufacturing a multilayer ceramic substrate for obtaining a multilayer ceramic substrate having high dimensional precision by suppressing the variance of the inner dimension of the substrate even in the case of performing calcination in a continuous furnace, in a method for manufacturing the multilayer ceramic substrate for performing calcination by laminating a restraining sheet composed of an inorganic component which is not sintered at the calcination temperature of the multilayer ceramic substrate at least on one surface of a green sheet laminated body. <P>SOLUTION: After laminating the restraining sheet 5 composed of the inorganic component which is not sintered at the calcination temperature of a ceramic green sheet 1 on at least one main surface of the green sheet laminated body 4, the green sheet laminated body 4 is placed on a movable belt and made to pass through an area heated to a desired temperature to perform calcination. After this, the restraining sheet 5 is removed. In the method for manufacturing the multilayer ceramic substrate, the thickness of the restraining sheet 5 is gradually reduced from a rear end side to a front end side with respect to the advancing direction of the movable belt. <P>COPYRIGHT: (C)2005,JPO&NCIPI |