发明名称 METHOD FOR MANUFACTURING MULTILAYER CERAMIC SUBSTRATE
摘要 <P>PROBLEM TO BE SOLVED: To provide a method for manufacturing a multilayer ceramic substrate for obtaining a multilayer ceramic substrate having high dimensional precision by suppressing the variance of the inner dimension of the substrate even in the case of performing calcination in a continuous furnace, in a method for manufacturing the multilayer ceramic substrate for performing calcination by laminating a restraining sheet composed of an inorganic component which is not sintered at the calcination temperature of the multilayer ceramic substrate at least on one surface of a green sheet laminated body. <P>SOLUTION: After laminating the restraining sheet 5 composed of the inorganic component which is not sintered at the calcination temperature of a ceramic green sheet 1 on at least one main surface of the green sheet laminated body 4, the green sheet laminated body 4 is placed on a movable belt and made to pass through an area heated to a desired temperature to perform calcination. After this, the restraining sheet 5 is removed. In the method for manufacturing the multilayer ceramic substrate, the thickness of the restraining sheet 5 is gradually reduced from a rear end side to a front end side with respect to the advancing direction of the movable belt. <P>COPYRIGHT: (C)2005,JPO&NCIPI
申请公布号 JP2004296711(A) 申请公布日期 2004.10.21
申请号 JP20030086061 申请日期 2003.03.26
申请人 KYOCERA CORP 发明人 NISHIURA TAKASUKE;NAGAE KENICHI;TOMISAKO MASAHIRO;KODAMA KAZUYOSHI
分类号 C04B35/64;H01L23/12;H05K3/46 主分类号 C04B35/64
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