摘要 |
To drill holes in an electric circuit substrate with the help of a laser beam, the drilling being performed by a circular motion of the laser beam within the area of the intended drill hole, the movement of the laser beam is created via two in-line deflection units. The first deflection unit, which preferably contains galvomirrors, triggers the jump of the laser beam from a drill position to the respective next drill position and the centering within the respective drill position. The second deflection unit, which preferable contains piezoelements, modulates a continuous circular motion onto the laser beam. In doing so the laser is only turned on if the first deflection unit is at a standstill.
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