ORGANO-SILSESQUIOXANE POLYMERS FOR FORMING LOW-K DIELECTRICS

摘要

A low dielectric constant polymer, comprising monomeric units derived from a compound having the general formula I (R<1>-R<2>)n-Si-(X<1>)4-n, wherein each X<1> is independently selected from hydrogen and inorganic leaving groups, R<2> is an optional group and comprises an alkylene having 1 to 6 carbon atoms or an arylene, R<1> is a polycycloalkyl group and n is an integer 1 to 3. The polymer has excellent electrical and mechanical properties.