发明名称 SOFT MATERIAL MACHINING TOOL
摘要 <P>PROBLEM TO BE SOLVED: To provide a machining and adjusting tool for a pad surface having superior machining efficiency. <P>SOLUTION: A plurality of projection parts 12 with cutting blade ridges 14 are provided on the surface 11 of a base 10. The projection part 12 is so formed that the cutting blade ridge 14 extends approximately orthogonally to the rotating direction T. The cutting blade ridge 14 is divided into a plurality of pieces to form a cavity 15 for releasing cutting chips formed in the cutting blade ridge 14. The upper surface 13 of the projection part 12 is set to a flat surface. A ratio S1/S2 of the total area S1 of the upper surfaces 13 of the plurality of projection parts 12 to the area S2 of the surface 11 of the base 10 is set to a range of 0.0001-0.01. The whole body of the base 10 is constituted of ceramic. <P>COPYRIGHT: (C)2005,JPO&NCIPI
申请公布号 JP2004291130(A) 申请公布日期 2004.10.21
申请号 JP20030085626 申请日期 2003.03.26
申请人 MITSUBISHI MATERIALS CORP 发明人 ATAKA YOSHITADA;OSHIMA HIDEO;MATSUKI RYUICHI
分类号 B24B53/12;B24D7/02;H01L21/304 主分类号 B24B53/12
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