| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a semiconductor dynamical quantity sensor, equipped with highly flexible structure having high degree of freedom that can also detect application of the dynamical quantity orthogonal in the direction of two axes with higher accuracy. <P>SOLUTION: A mass, serving as weight for detecting the application of a dynamical quantity is partitioned into three masses of 301-303, and these masses 301-303 are connected by the connection beams CB1-CB4. Among these, the masses 301 and 303 located in the edge are supported by a semiconductor substrate 1 via respective beams B1-B4, respectively in a form permitting displacement with respect to the orthogonal orientation of these connected masses. While for a mass 302 of the center, respectively connected with these masses 301 and 303 via the connection beams CB1-CB4, only displacement in the connecting direction of these masses is permitted by these connection beams CB1-CB4. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
