发明名称 CIRCUIT BOARD, MANUFACTURING METHOD AND POWER MODULE USING THE SAME
摘要 PROBLEM TO BE SOLVED: To reduce the load for etching and resist processing, to improve the size precision and to make a circuit interval small for obtaining a circuit board by a metal-insulator composite member, and to provide a circuit forming method and a product with versatility. SOLUTION: An unnecessary part (circuit gap part) of one metal layer 4A in the composite member 2 formed of a ceramic insulating plate 3 and metal layers 4A and 4B made of aluminum plates is mainly removed by milling. For suppressing cracks due to warp of the board, a metal remaining layer 4Aa is left in a base, and it is desirable that it is removed by etching. Milling is performed after an etching resist thin film layer 5 is given on the surface of the metal layer. Then, milling is performed in two stages. Thus, a step is made in the base of a circuit side, an edge is constituted, and the outer stress can be reduced. COPYRIGHT: (C)2005,JPO&NCIPI
申请公布号 JP2004296619(A) 申请公布日期 2004.10.21
申请号 JP20030084828 申请日期 2003.03.26
申请人 DOWA MINING CO LTD 发明人 HARA MASAHIRO;OSANAI HIDEYO
分类号 B23C3/00;H01L23/12;H05K1/02;H05K1/03;H05K3/04;H05K3/06;(IPC1-7):H05K3/04 主分类号 B23C3/00
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