REINFORCING ELEMENT, AND METHOD FOR MACHINING SUBSTRATE USING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a method for etching a substrate after reinforcing the substrate, and also to provide a reinforcing element for reinforcing the substrate. SOLUTION: The reinforcing element is used in a process for etching the substrate 1 after reinforcing the substrate 1. A sticking plate 3 is integrated with the substrate 1 via a sticking agent 2, which has fluidity and has been spread on the substrate 1. The sticking plate 3 is formed so as to have one or more through holes 4 thereon. COPYRIGHT: (C)2005,JPO&NCIPI