PROCESS FOR FABRICATING MICROMACHINE

摘要

A process for fabricating a micromachine in which removal of a sacrifice layer and sealing can be carried out without requiring any special packaging technology. The process for fabricating a micromachine (1) equipped with an oscillator (4) comprises a step for forming a sacrifice layer around the movable part of the oscillator (4), a step for covering the sacrifice layer with an overcoat film (8) and making a through opening (10) communicating with the sacrifice layer through the overcoat film (8), a sacrifice layer etching step for removing the sacrifice layer through the use of the trough opening (10) in order to form a space around the movable part, and a step for sealing the trough opening (10) by performing film deposition while reducing the pressure following etching of the sacrifice layer.