Nanoporous ultrafine alpha-alumina powders and sol-gel process of preparing the same

摘要

The present invention provides ±-alumina powders comprising ±-alumina particles of which at least 80% of the ±-alumina particles have a particle size of less than 100nm. The invention also provides slurries, particularly aqueous slurries, which comprise ±-alumina powders of the invention. The invention further provides methods of manufacturing ±-alumina powders and ±-alumina slurries of the invention and methods of polishing using same.