| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a mask capable of preventing lowering of alignment precision caused by a reinforced part of the mask while relaxing restriction on the alignment mark position, and to provide an alignment method. <P>SOLUTION: The alignment method comprising a step for irradiating an exposure object arranged on the second surface side of a mask with alignment light through the mask from the first surface side thereof, and a step for aligning the mask and the exposure object by detecting the alignment light reflected from the exposure object on the first surface side is further provided with a step for reflecting the alignment light on the wall face at a reinforced part formed on the first surface of the mask. That mask is employed in the inventive alignment method. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
