发明名称 DEVICE AND METHOD FOR SUPPLYING RESIN SEALING FILM
摘要 PROBLEM TO BE SOLVED: To provide a device and a method for supplying a resin sealing film which maintains tension caused to a stopped film at an appropriate level in resin sealing. SOLUTION: The device comprises a delivery roll 2 consisting of a film 1; a reference roll 3, a take-up roll 4; a delivery rotary shaft 5 which is fitted in the delivery roll 2; a take-up servo motor 6 which is connected to the rotary shaft 5; a delivery encoder 7 which is fixed to the servo motor 6; a reference encoder 9 which is fixed to a reference roller shaft 8; a take-up rotary shaft 10 which is fitted in the take-up roll 4; a take-up side servo motor 11 which is connected to the rotary shaft 10; a take-up encoder 12 which is fixed to the servo motor 11; and a control unit 13 for controlling each of the servo motors 6, 11 on the basis of pulse signals Sf, Ss, Sw from the encoders 7, 9, 12, respectively, so that the tension caused to the film 1 settles down at a predetermined optimal value. COPYRIGHT: (C)2005,JPO&NCIPI
申请公布号 JP2004296691(A) 申请公布日期 2004.10.21
申请号 JP20030085862 申请日期 2003.03.26
申请人 TOWA CORP 发明人 HIRATA SHIGERU
分类号 B29C45/02;B29C45/14;B29C45/17;B29L31/34;H01L21/56;(IPC1-7):H01L21/56 主分类号 B29C45/02
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