| 摘要 |
PROBLEM TO BE SOLVED: To solve a transmissivity falling phenomenon when optical parts for a stepper is subjected to optical washing. SOLUTION: In an optical washing method having a process for storing an object to be washed in a washing tub, a process for introducing an oxygen-containing gas into the washing tub and a process for irradiating the object to be washed with ultraviolet light from sources of ultraviolet light, total amount of organic substances contained in the gas occupying a space where the object to be washed is stored is made to be≤20μg/m<SP>3</SP>when expressed in terms of hexadecane. COPYRIGHT: (C)2005,JPO&NCIPI |
