| 摘要 |
PROBLEM TO BE SOLVED: To provide a transfer device a transport device and a transfer method which allows an easy extension of the transport devices. SOLUTION: The transfer device comprises a support means 51 for supporting an object for transport Wf, a guide means 53 which is provided along treatment devices 23, 24, 26, and 27 for treating the object for transport Wf and controls the direction of movement of the support device 51, a synchronous controlling means 41 which is a transfer device 1 provided between a plurality of transfer devices 20 and 120 that include a moving device 55 which moves the supporting device along the guiding device 53, and synchronizes the moving means 55 of the transport device 20 on one side with the moving means of the transport device 120 on the other side, and at least one of transfer means 21 which receives the object of transport Wf from the support means 51 of the transport device 20 on one side and delivers it to the support means of the transport device 120 on the other side. COPYRIGHT: (C)2005,JPO&NCIPI
|
