| 摘要 |
PROBLEM TO BE SOLVED: To provide an inexpensive position displacement sensor of simple structure excellent in space efficiency, without affecting performance. SOLUTION: This position displacement sensor includes n pieces of impedance elements L1-Ln, and a magnetic response member arranged noncontactly to be relatively displaceable to the respective elements, and a positional displacement of a detected object is detected by acquiring detection signals in response to a relative position with respect to the respective elements of the magnetic response member from the respective elements. In the position displacement sensor, the first ends of the respective elements are connected to the other end of an alternating current source grounded with one end for impressing respectively alternating voltages V1-Vn shifted in their phases, all the second ends are collectively connected, the respective elements generate impedance changes in accompaniment to changes of relative positions thereof to the magnetic response member, a compound potential to ground containing the position displacement as a phase difference is thereby taken out from a point CW concerned in the collective connection, and the positional displacement of the magnetic response member is detected using it. COPYRIGHT: (C)2005,JPO&NCIPI
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