AIRTIGHTNESS DEGREE MANAGEMENT SYSTEM AND AIRTIGHTNESS DEGREE MANAGEMENT METHOD

摘要

PROBLEM TO BE SOLVED: To provide an airtightness degree management system and an airtightness degree management method for confirming airtightness degree of a sealing valve always and recognizing airtightness degree speedily and easily when no airtightness degree is secured. SOLUTION: A gas flow passage is sealed by blades 14a, 14b of an airtight damper 1 to form a sealed space 19. A vacuum pump 3 is connected to the sealed space 19 to maintain the sealed space in a fixed negative pressure condition. A vacuum abnormality lamp 7 and a vacuum gage 5 are connected to the sealed space 19 through a vacuum switch 4 to detect a sealed condition in the sealed space 19 by a pressure condition in the sealed space 19 in order to manage airtightness degree. COPYRIGHT: (C)2005,JPO&NCIPI