Detecting environmental or process parameters in process-wafer manufacturing environment for semiconductor integrated circuit manufacture, by exposing wafer comprising sensors to manufacturing environment

摘要

By arranging sensors (31,32,33) on a carrier substrate (2), a sensor wafer (1) is provided which is compatible with the processor wafers for the manufacturing environment. The sensor wafer is exposed to the manufacturing environment in the manner of a process wafer. At least some of the sensors are formed as gas sensors. Independent claims are included for a sensor-wafer, and for a measuring device for detecting environmental and/or process parameters.