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发明名称
摘要
申请公布号	JP2004532512(A)	申请公布日期	2004.10.21
申请号	JP20020566534	申请日期	2002.02.11
申请人		发明人
分类号	C23C16/18;H01L21/02;H01L21/28;H01L21/285;H01L21/8242;H01L27/108;(IPC1-7):H01L21/824	主分类号	C23C16/18
代理机构		代理人
主权项
地址

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