HIGH-SPEED GAS PRESSURE-CONTROLLING DEVICE

摘要

A high-speed gas pressure-controlling device with a cascade control mechanism. The cascade control mechanism outputs a first control signal to a pneumatic servo-valve in accordance with a gas flow rate measured by a flow rate sensor (1) provided at a gas exit of the servo-valve and controls the servo-valve by outputting a second control signal to the servo-valve in accordance with a pneumatic pressure measured by a pressure sensor (2) provided in the downstream side of the flow rate sensor (1). Non-linearity in response characteristics of the servo-valve is absorbed and gain reduction caused by waste-time characteristics of pneumatic piping etc. connected is prevented. These enable high-speed control of pneumatic pressure.