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发明名称
VERFAHREN ZUR ERZEUGUNG EINER STUFENFÖRMIGEN STRUKTUR AUF EINEM SUBSTRAT
摘要
申请公布号
DE50201051(D1)
申请公布日期
2004.10.21
申请号
DE20025001051
申请日期
2002.07.02
申请人
INFINEON TECHNOLOGIES AG
发明人
HERZUM, CHRISTIAN
分类号
H01L21/28;H01L29/423;(IPC1-7):H01L29/423
主分类号
H01L21/28
代理机构
代理人
主权项
地址
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