CARRIER BOX FOR FABRICATING SEMICONDUCTOR DEVICE TO REDUCE CONTAMINATION OF WAFER DUE TO PARTICLES

摘要

PURPOSE: A carrier box for fabricating a semiconductor device is provided to discharge particles to exhaust holes and reduce contamination of a wafer due to the particles by forming a plurality of embossing patterns on a bottom face of a carrier box and forming a plurality of exhaust holes thereon. CONSTITUTION: A main body(120) is used for storing a carrier. A cover(140) is used for opening or shutting an upper part of the main body. A plurality of exhaust holes(126) are used for discharging the particles generated from the inside of the main body. The exhaust holes are formed on a bottom face of the main body. A plurality of embossing patterns are formed on a bottom face of the carrier box.