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发明名称
光罩蒸镀方法及装置,光罩及光罩的制造方法,显示屏制造装置,显示屏以及电子机器
摘要
具有藉由工作台1的静电引力吸引被蒸镀对象的玻璃基板20的工程,及进行被吸引的玻璃基板与蒸镀光罩2的对位的工程,及蒸发成为蒸镀对象的电场发光元件的有机化合物而蒸镀于玻璃基板20的工程者。又,视状况,在蒸镀光罩具有静电夹头功以提高密接性。
申请公布号
TW200420735
申请公布日期
2004.10.16
申请号
TW092133413
申请日期
2003.11.27
申请人
精工爱普生股份有限公司
发明人
迹部光朗;四谷真一
分类号
C23C14/00;H05B33/00
主分类号
C23C14/00
代理机构
代理人
林志刚
主权项
地址
日本
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