WÄSSRIGE REINIGUNGSLÖSUNG FÜR EIN HALBLEITERSUBSTRAT,申请号AT19970936578T-传众专利搜索

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发明名称	WÄSSRIGE REINIGUNGSLÖSUNG FÜR EIN HALBLEITERSUBSTRAT
摘要
申请公布号	AT276586(T)	申请公布日期	2004.10.15
申请号	AT19970936578T	申请日期	1997.07.31
申请人	INFINEON TECHNOLOGIES AG	发明人	MARTIN, ANDREAS;HUB, WALTER;KOLBESEN, BERND
分类号	H01L21/304;C11D3/39;C11D7/26;C11D7/32;C11D7/34;H01L21/306;(IPC1-7):H01L21/306;C11D7/50	主分类号	H01L21/304
代理机构		代理人
主权项
地址

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