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发明名称
LEISTUNSPULSANORDNUNG MIT HOHER PULSRATE UND FLÜSSIGKEITSKÜHLUNG
摘要
申请公布号
AT279035(T)
申请公布日期
2004.10.15
申请号
AT20000975177T
申请日期
2000.07.25
申请人
CYMER, INC.
发明人
BIRX, DANIEL, L.;PARTLO, WILLIAM, N.;NESS, RICHARD, M.;ROTHWEIL, DANIEL, A.;MELCHER, PAUL, C.;SMITH, BRETT, D.
分类号
H01S3/104;G03F7/20;H01S3/097;H01S3/225;H02M3/00;H02M9/06;H03K3/57;H03K17/80;(IPC1-7):H01S3/00
主分类号
H01S3/104
代理机构
代理人
主权项
地址
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