| 摘要 |
PROBLEM TO BE SOLVED: To realize a semiconductor testing device which uses a semiconductor relay for switching signal generators. SOLUTION: The device is an improved semiconductor testing device for testing an object to be tested. The device has signal generators for outputting signal to the object to be tested, a semiconductor relay provided on the signal path between the signal generator and the object to be tested for turning on and off, and a controller for making the signal generator output a voltage which is different from the output of the object to be tested. COPYRIGHT: (C)2005,JPO&NCIPI
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