| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of transforming the crystal structure of a group 13 element nitride, which method can transform the crystal structure of the nitride by using an apparatus of a structure simpler than that used in a method for transforming the crystal structure of a group 13 element nitride by a static pressure application method. SOLUTION: The method of transforming the crystal structure of a group 13 element nitride comprises converting carrier gas He and a powder of hexagonal aluminum nitride into an aerosol in an aerosol formation chamber 2, sending the aerosol to a film formation chamber 4 through a conveying pipe 3, previously evacuating the film formation chamber 4 by a vacuum pump 5 so that the chamber 4 may be kept at a degree of vacuum of 200 to 8,000 [Pa] after the aerosol is supplied thereto, and spraying the aerosol onto a substrate fixed to a substrate holder 7 from a nozzle 6 formed on the end of the conveying pipe 3 in the chamber 4 under conditions in which the impact strength at the time of collision of particles is 4 [GPa] or higher. The crystal structure of the aluminum nitride is transformed from a hexagonal crystal system to a cubic crystal system to progress the deposition of the cubic aluminum nitride on the substrate. COPYRIGHT: (C)2005,JPO&NCIPI
|
