NANO PRINTER AND MICROSTRUCTURE TRANSFER METHOD

摘要

PROBLEM TO BE SOLVED: To perform pattern transfer with high precision in a nano-printing method by lowering the pressure of a press and shortening the pressing time. SOLUTION: The nano-printer for forming a microstructure on a substrate using a press is characterised by having a mechanism generating an ultrasonic wave for vibrating a stamper. A microstructure transfer method employing the nano-printer is also provided. COPYRIGHT: (C)2005,JPO&NCIPI