| 摘要 |
PROBLEM TO BE SOLVED: To provide a Nipkow disk in which reflection light to a detection system can be suppressed, and a confocal scanning device using this disk. SOLUTION: In a Nipkow disk 6 in which pin holes 6a are formed in a light shading member 20 formed at a one plane 6c of a disk glass substrate 6b in a spiral and radial form, surfaces 20a, 20b of the light shading member 20 are tilted to the other plane 6c of the glass substrate. COPYRIGHT: (C)2005,JPO&NCIPI
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