| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for simply calculating the quantity of a functional group introduced into the surface of a substrate, especially, a substrate inspecting method for preliminarily introducing an amino group into the surface of the substrate and calculating the introducing quantity of an aldehyde group when the aldehyde group is introduced through the amino group. SOLUTION: In the substrate inspecting method, the generation quantities of fluorescence on the surface of the substrate before and after an aldehyde group introducing process are compared with each other not only to judge whether the aldehyde group is introduced or not but also to determinate the introducing quantity of the aldehyde group and it is judged whether or not the aldehyde group is introduced on the basis of a change in the generation quantity of fluorescence at the application of reducing agent treatment to the substrate after the aldehyde group is introduced. By this method, it can be confirmed that the aldehyde group is introduced into the surface of the solid-state substrate and the introducing amount of the aldehyde group can be determinated simply. COPYRIGHT: (C)2005,JPO&NCIPI
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