| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a plasma treating device and a plasma treating method for use in plasma-treating, an object gas containing volatile noxious components under the atmospheric pressure and making the gas non-noxious, capable of remarkably reducing the generation of an electric discharge byproduct (NOx) caused by an electric discharge, thereby effectively decomposing the gas to be treated and thus making the same non-noxious. <P>SOLUTION: This invention relates to the plasma treating device including a plasma reactor having a plasma treating space for effecting an electric discharge under the atmospheric pressure to generate a plasma so as to plasma-treat the object gas. The plasma treating space contains an earthed electrode (3) and a high voltage electrode (2), and has an inorganic dielectric member (4) disposed between these two electrodes. Further, another inorganic dielectric member (5) having a dielectric constant lower than that of the inorganic dielectric member (4) is disposed between the inorganic dielectric member (4) and at least one of the earthed electrode (3) and the high voltage electrode (2). On a rear portion of the plasma reactor, there is equipped a catalyst-tank loaded with a catalyst capable of decomposing ozone. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
