| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for dicing which can easily remove a burr generated at the corner of the intersection position of respective grooves when the grooves are formed in the square-like states of a Go board on a workpiece made of a soft metal or a material containing the soft metal and which can discharge the burrs from the grooves. SOLUTION: Channel 1 working for forming the grooves G1 in a first direction on the workpiece W is performed by a rotating dicing blade, and then channel 2 working for forming the grooves G2 in a second direction perpendicular to the first direction is performed. Then, the burrs B, B generated at the intersection corners of the grooves G1 of the first direction, and the grooves G2 of the second direction are inserted into the grooves G1 of the first direction and are removed while a working liquid is supplied again to the rotating dicing blade. Thus, the burrs B, B in the grooves are easily removed during a series of automatic operations, and are discharged from the grooves. COPYRIGHT: (C)2005,JPO&NCIPI |
