Wafer carrying robot teaching method and teaching plate

摘要

A method for teaching a water carrying robot which employs a simple, inexpensive apparatus and is capable of not only maintaining a clean condition inside a front end but also effecting a saving of teaching work. A positioning mark (3) is provided on the hand (2) of a wafer carrying robot (1) and a teaching plate (5) having a camera (6) for pickup of the positioning mark (3) is arranged at a predetermined position. The positioning mark (3) is photographed by the camera (6) and an operator corrects the position of the hand (2) so that the positioning mark (3) occupies a predetermined position in an image of the camera (6) and positions the hand (2) in a horizontal plane.