摘要 |
<p>A cavity electrode structure having a pair of opposed electrodes between which a narrow gap is formed with high precision, a sensor using the same, and a protein detection device are disclosed. The cavity electrode structure comprises a first electrode, an insulating layer disposed on the first electrode and having a through hole in which a part of the first electrode is exposed, a second electrode overhanging toward the inside of the through hole, opposed to the exposed surface of the first electrode, and having an opening communicating with the through hole, and a cavity defined by the exposed surface of the first electrode, the inner wall of the through hole and the surface, opposed to the first electrode, of the second electrode. The sensor comprises a conductive bridging member having one end secured to the exposed surface of the first electrode of the cavity electrode structure, the other end secured to the opposed surface of the second electrode, and a portion specifically bonded to a substance to be detected. The protein detection device comprises a bridging member having a portion specifically bondable to a substance to be detected.</p> |