| 摘要 |
<p>Photonic light circuits including one or more optical waveguides and one or more waveguide features and methods for manufacturing photonic light circuits including one or more optical waveguides. One aspect of this invention includes methods for manufacturing planar waveguide based devices including the steps of removing a portion of an exposed surface of a substrate (10) to form a first cavity (12), depositing a layer (14) of first optical material on the exposed substrate surface in an amount sufficient to fill the first cavity (12) with the first optical material and to cover at least a portion of the exposed substrate surface; and removing at least a portion of the first optical material layer to form at least one planar waveguide. In another aspect, this invention is a method for manufacturing a planar waveguide including at least one feature by the further steps including removing at least a portion of the first optical material (14) located in the first cavity to form a second cavity (20), depositing a second optical material (19) into the second cavity (20) in an amount sufficient to fill the second cavity (20) with the second optical material (19); and removing at least portion of the second optical material (19) from the substrate to form a feature.</p> |
