SUBSTRATE STANDBY APPARATUS, AND SUBSTRATE TREATMENT APPARATUS PROVIDED WITH SAME

摘要

PROBLEM TO BE SOLVED: To provide a substrate standby apparatus capable of delivering a substrate to a substrate supporting part having an optional shape, and to provide a substrate treatment apparatus. SOLUTION: A pair of substrate standby arms 110 moves inward like multistage. The respective substrate supporting parts 120 are arranged so that piston rods 122, pusher pin supporting parts 123 and pusher pins 124 may avoid contacting with the substrate standby arms 110 and carrying rollers 103 in a state where the piston rods 122 are raised. In a state where the piston rods 122 are raised most, the tips of the respective pusher pins 124 are positioned to be higher than the substrate standby arms 110. In a state where the piston rods 122 are lowered most, the tips of the respective pusher pins 124 are positioned to be lower than the plurality of carrying rollers 103. COPYRIGHT: (C)2005,JPO&NCIPI