NANO PRINTING APPARATUS AND MICROSTRUCTURE TRANSFER METHOD

摘要

PROBLEM TO BE SOLVED: To transfer a pillar with a high aspect ratio in a nano printing method. SOLUTION: In a nano printing apparatus for heating and pressurizing a substrate and a stamper having fine unevenness formed on the surface to form a microstructure on the substrate, the stamper has a mechanism for transferring and coating a peeling material. A method for transferring the microstructure uses this nano printing apparatus. COPYRIGHT: (C)2005,JPO&NCIPI