| 摘要 |
PROBLEM TO BE SOLVED: To provide a semiconductor manufacturing apparatus which can be informed of the case where a largely different teaching data value is falsely input. SOLUTION: In the semiconductor manufacturing apparatus, the teaching operation which is an operation of registering an operation position of a conveying mechanism in advance based on a drive amount of a motor in the conveying mechanism. The apparatus has a function of alerting when a teaching data value prior to the teaching operation is compared with the teaching data value after the teaching operation and such a compared value exceeds a preset specific value. COPYRIGHT: (C)2005,JPO&NCIPI |
