发明名称 |
Thermal type infrared detector and infrared focal plane array |
摘要 |
A thermal infrared detector includes a substrate; a temperature sensor having electrical characteristics changed in accordance with changes in temperature caused by infrared absorption; heat-insulating supporting legs supporting and thermally insulating the temperature sensor and serving as signal lines for reading out electrical signals from the temperature sensor; and an infrared absorption layer in thermal contact the temperature sensor. Each of the temperature sensor, the heat-insulating supporting legs, and the infrared absorption layer is in a different plane and the planes are spatially separated from each other.
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申请公布号 |
US2004200962(A1) |
申请公布日期 |
2004.10.14 |
申请号 |
US20030658407 |
申请日期 |
2003.09.10 |
申请人 |
MITSUBISHI DENKI KABUSHIKI KAISHA |
发明人 |
ISHIKAWA TOMOHIRO;UENO MASASHI |
分类号 |
G01J1/02;G01J5/02;G01J5/10;G01J5/20;G01J5/48;H01L27/14;H01L37/00;(IPC1-7):G01J5/02 |
主分类号 |
G01J1/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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