| 摘要 |
PROBLEM TO BE SOLVED: To realize a charged particle device capable of easily recognizing a state of progress of a working process, and where an error, if any, occurs. SOLUTION: A working process is divided into groups (POSITION 1, POSITION 2, POSITION 3) in compliance with the kinds of works, and displayed in layered sequence (Catalog 1 to 3) of the start of a treatment, or by discriminating between a pretreatment (FABRICATION 1 to 3) and an actual work treatment (SPUTTER 1), and whether it is before practice, or in practice, or after practice, and whether an error has occurred or not, is discriminated and displayed. By the above, an operator can easily recognize the state of progress of the working process, and the position of the error in case it occurs. As a temporal suspension of a process (SUSPENSION) is defined and inserted between a certain process and a succeeding process, an additional process can be easily inserted after the temporal suspension. COPYRIGHT: (C)2005,JPO&NCIPI
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