| 摘要 |
A modified polyvinyl alcohol (PVA) protected by a protective group, wherein the content of high-molecular components having a weight-average molecular weight, as determined through measurement by gel permeation chromatography and calculation for standard polyethylene glycol, of 250,000 or higher is up to 1,000 ppm of the modified polyvinyl alcohol. This modified PVA is produced by treating a water-soluble modified PVA, e.g., acetalized PVA, with ion exchange, subsequently subjecting the polymer to the elimination of metal ions and acids, and then heating the resultant PVA at a temperature of 80°C or higher. Also provided is an auxiliary for fine-pattern formation which comprises the modified PVA, a water-soluble crosslinking agent, and either water or a mixed solvent comprising water and a water-soluble organic solvent. |
