| 摘要 |
PROBLEM TO BE SOLVED: To reduce the area of a chip by eliminating a shield electrode in a semiconductor dynamic quantity sensor. SOLUTION: All the outermost electrodes are movable electrodes 2. Even when the outermost movable electrodes come into contact with a beam 4 at the impression of acceleration of a specified value or larger, signal variations do not occur since the movable electrodes and the beam have the same potential. Therefore, shield effects is realized even when the shield electrode 10 is eliminated. COPYRIGHT: (C)2005,JPO&NCIPI |
