| 摘要 |
PROBLEM TO BE SOLVED: To provide the moving mechanism of a moving carriage and its movement control method for making it possible for anyone to easily and quickly perform its setting without performing the setting of any guide rail, and to perform its highly precise tracking with excellent repetitive reproducibility. SOLUTION: This mechanism is provided with a light receiver 5 and a light emitter 6 arranged at the mobile carriage or fixed positions so as to be faced to each other so that lights emitted by the light emitter 6 can be received by the light receiver 5, a detecting device 7 for detecting the displacement error and azimuth error to the moving direction of the mobile carriage based on the light quantity and phase of the received lights and a controller 8 for controlling the steering of the mobile carriage so that the detected displacement error and azimuth error can be offset. Thus, it is possible to continuously control the moving direction of the mobile carriage. COPYRIGHT: (C)2005,JPO&NCIPI
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