| 摘要 |
A plasma-enhanced coaxial magnetron sputter-cleaning and coating assembly (100) for sputter-cleaning and coating the interior surfaces of a cylindrical workpiece (102) is provided. The apparatus sputter-coats the workpiece using a cylindrical sputtering material (110), the material having an interior and an exterior. The apparatus includes a core cooling system (106) surrounded by a ring magnet assembly including a plurality of axially aligned ring magnets (108), with the core cooling system and the ring magnet assembly axially aligned with, and residing in the interior of, the cylindrical sputtering material. A cylindrical-shaped filament (112) circumferentially surrounds the exterior of the cylindrical sputtering material. An anode (114) comprised of a wire screen circumferentially surrounds, and is external to the filament; whereby the apparatus for plasma-enhanced coaxial magnetron sputter-cleaning and coating may be housed inside the workpiece in order to sputter-clean and coat the interior of the workpiece. |
