| 摘要 |
PROBLEM TO BE SOLVED: To provide optical waveguide structure which has a low coefficient of elasticity and which is excellent in flexibility and also which has small propagation loss. SOLUTION: In this polymer optical waveguide structure in which a core and a cladding are composed of polymer material, the core comprises a silicon-containing material and at least a part of cladding consists of a polyimide resin, and the manufacturing method of the polymer optical waveguide structure is characterized by forming the polymer optical waveguide structure on a silicon substrate while executing a process for arranging a first cladding on the silicon substrate, a process for arranging the core on the first cladding and a process for arranging a second cladding so as to cover the core in this order. The propagation loss of the optical waveguide structure become very low propagation loss compared with that of the polymer optical waveguide structure consisting of only the conventional polyimide resin. COPYRIGHT: (C)2005,JPO&NCIPI |
