| 摘要 |
PROBLEM TO BE SOLVED: To transfer a large-sized glass substrate exactly to prescribed coordinates without any positional deviation. SOLUTION: A working spindle-side movable table 10 equipped with a driving section 7, a driven movable table 12, and a member 14 for coupling the driving and driven tables are combined together. A test substrate fixing holder 16 is pivotably supported to the working spindle-side movable table 10 via a rotary shaft 15. Between the test substrate fixing holder 16 and the driven movable table 12, there is a rolling member 21. COPYRIGHT: (C)2005,JPO&NCIPI |
